Marco R. Cavallari, J. E. E. Izquierdo, D. C. García, V. A. M. Nogueira, J. D. S. Oliveira, L. M. Pastrana, I. Kymissis, F. Fonseca
{"title":"Cross-linked polyvinyl phenol as dielectric for flexible bottom gate bottom contact transistors","authors":"Marco R. Cavallari, J. E. E. Izquierdo, D. C. García, V. A. M. Nogueira, J. D. S. Oliveira, L. M. Pastrana, I. Kymissis, F. Fonseca","doi":"10.1109/SBMicro.2019.8919401","DOIUrl":null,"url":null,"abstract":"Polyvinyl phenol with a cross-linker agent was demonstrated as a dielectric film and incorporated to a bottom gate organic transistor structure. Films were shown transparent to visible light, resistant to organic solvents and compatible with plasma etching to open vias. Only cross-linked films, however, withstood lithography in order to pattern bottom contact electrodes on top of the dielectric. Cross-linked films showed a dielectric constant of ca. 5, which is higher than polymethylmethacrylate and silicon oxide. The devices herein have potential to be applied in flexible sensor arrays from organic transistors.","PeriodicalId":403446,"journal":{"name":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 34th Symposium on Microelectronics Technology and Devices (SBMicro)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SBMicro.2019.8919401","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
Polyvinyl phenol with a cross-linker agent was demonstrated as a dielectric film and incorporated to a bottom gate organic transistor structure. Films were shown transparent to visible light, resistant to organic solvents and compatible with plasma etching to open vias. Only cross-linked films, however, withstood lithography in order to pattern bottom contact electrodes on top of the dielectric. Cross-linked films showed a dielectric constant of ca. 5, which is higher than polymethylmethacrylate and silicon oxide. The devices herein have potential to be applied in flexible sensor arrays from organic transistors.