High performance Si3N4 waveguide devices platform

Abstract

Si₃N₄ strip and slot waveguide passive devices platform are demonstrated based on standard CMOS process including athermal MZI filter, multi-channel ring filter, two-ring EIT and AWG. The loss of Si₃N₄ strip waveguide is 0.6dB/cm for TE mode and 0.66dB/cm for TM mode. A 20-channel micro-ring filter with 25GHz channel spacing is realized with 15dB cross-talk on this Si₃N₄ platform. Thermal tuning EIT is demonstrated with two-ring filter structure with heater on one of the ring resonator. A 16-channel AWG is realized with a 100GHz channel spacing and 15 dB extinction ratio.