Reliability test of interconnections using electrical noise measurement

Abstract

The excess electrical noise in aluminum and aluminum alloy thin films were measured. The magnitude and frequency exponent for noise spectra of 1/f/sup alpha / were measured as a function of the sample temperature and current density. Two different regions in plots of normalized 1/f/sup alpha / noise magnitude, with alpha between 1.2 and 2.2. versus inverse temperature were observed. The time dependence experiment on excess noise of aluminum showed 1/f/sup alpha /, with alpha larger than 2.2, noise spectra during later stages of the electromigration process.<>