Two-dimensional photonic crystals fabrication and close-packing by electron-beam lithography

International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices Pub Date : 2012-07-02 DOI:10.1109/EDM.2012.6310185

D. Utkin, D. A. Nasimov, A. Latyshev

引用次数: 1

Abstract

It is brought an approach of creation and close-packing two-dimensional photonic crystals with given sizes of elements by the EBL. The main problems of formation these structures were considered.

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利用电子束光刻技术制备二维光子晶体及其紧密封装

本文提出了一种利用电子束流建立和紧密堆积具有一定尺寸元素的二维光子晶体的方法。讨论了这些结构形成的主要问题。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

International Conference and Seminar of Young Specialists on Micro/Nanotechnologies and Electron Devices

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