CTGS material parameters obtained by versatile SAW measurements

S. Biryukov, H. Schmidt, A. Sotnikov, M. Weihnacht, S. Sakharov, O. Buzanov
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引用次数: 11

Abstract

Recently big size high quality piezoelectric single crystals of Ca3TaGa3Si2O14 (CTGS) have been grown. This temperature durable crystal is very promising for future application in different devices based on surface acoustic waves (SAW) due to its high electromechanical coupling compared to quartz. In contrast to the popular langasite, CTGS is a more ordered compound and therefore stands for better characteristics at both, high temperatures and high frequencies. During the last decade several sets of material constants for CTGS were published extracted from bulk acoustic wave measurements on small samples, but these results are strongly different from each other. Moreover, all published constant sets lead to unacceptable numerical differences for calculated SAW velocities when compared to recent measurements of SAW velocities on large CTGS wafers. In this work we present a new set of room temperature CTGS material constants, extracted by combination of high-precision SAW phase velocity measurements with proprietary numerical procedures developed in-house.
CTGS材料参数通过多用途SAW测量获得
近年来,制备出了大尺寸、高质量的Ca3TaGa3Si2O14 (CTGS)压电单晶。与石英相比,这种耐高温的晶体具有较高的机电耦合性,因此在基于表面声波(SAW)的不同器件中具有很大的应用前景。与常见的langasite相比,CTGS是一种更有序的化合物,因此在高温和高频下都具有更好的特性。在过去的十年中,从小样本的体声波测量中提取了几组CTGS的材料常数,但这些结果彼此之间存在很大差异。此外,与最近在大型CTGS晶圆上测量的SAW速度相比,所有公布的常数集导致计算的SAW速度存在不可接受的数值差异。在这项工作中,我们提出了一套新的室温CTGS材料常数,该常数由高精度SAW相速度测量和内部开发的专有数值程序相结合提取。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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