A Parametric Study of Dimensional Tolerance and Hydrodynamic Debris Removal in Micro-Electro-Discharge Machining

Abstract

This paper reports a detailed evaluation of batch mode micro-electro-discharge machining (μEDM) of 316L stainless steel. Lithographically fabricated copper tools with parallel line features of 5-50 μm width and 5-75 μm spacing were used to quantify trends in machining tolerance and the impact of debris accumulation. As tool feature density increased, debris accumulation effects began to dominate, eventually destroying both tool and workpiece. A two-step hydrodynamic debris removal technique yielded significant improvements in surface and edge finish, machining time, and tool wear over past work using standard vertical dither flushing.