Carbon Nanotube Lateral Field Emitters with Metallic Anode

2006 19th International Vacuum Nanoelectronics Conference Pub Date : 2006-07-01 DOI:10.1109/IVNC.2006.335248

Y. Wong, W. Kang, J. Davidson, B. Choi, J.H. Huang

引用次数: 0

Abstract

A lateral carbon nanotube (CNT) field emission device with a metallic anode is fabricated through a dual-mask microfabrication process complemented with a two-step microwave plasma-enhanced chemical vapor deposition. SEM was employed to characterize the structure of the fabricated device

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金属阳极碳纳米管横向场发射体

采用双掩膜微加工工艺和两步微波等离子体增强化学气相沉积工艺制备了一种金属阳极的横向碳纳米管场发射器件。利用扫描电镜对制备的器件进行了结构表征

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2006 19th International Vacuum Nanoelectronics Conference

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