T. Hoshino, S. Aoki, Masahide Itoh, M. Shichiri, Hiroshi Itoh
{"title":"Scatterometry of isolated resist pattern by soft X-rays using deep-learning analysis","authors":"T. Hoshino, S. Aoki, Masahide Itoh, M. Shichiri, Hiroshi Itoh","doi":"10.1364/dh.2022.w5a.20","DOIUrl":null,"url":null,"abstract":"When the scattering or absorption is large, the 3D resolution is about 100 wavelengths in holography, but the combination of scatterometry, imaging, and deep learning is a general-purpose method with a resolution of about wavelength.","PeriodicalId":227456,"journal":{"name":"Digital Holography and 3-D Imaging 2022","volume":"136 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digital Holography and 3-D Imaging 2022","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/dh.2022.w5a.20","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
When the scattering or absorption is large, the 3D resolution is about 100 wavelengths in holography, but the combination of scatterometry, imaging, and deep learning is a general-purpose method with a resolution of about wavelength.
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