Thermal and temporal stability of nitridated Ru/B4C multilayer for high flux monochromator application

Yang Liu, Qiushi Huang, Hui Jiang, R. Qi, Yufei Feng, Guangzhi Yin, Xingmin Zhang, Zhong Zhang, Zhanshan Wang
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引用次数: 1

Abstract

Nitridated Ru/B4C multilayers for hard X-ray monochromator were fabricated and annealed to analyze the thermal stability. The results show that the nitridated multilayer remains stable up to 300 °C and no structure changes were observed in 2 years.
用于高通量单色仪的氮化Ru/B4C多层膜的热稳定性和时间稳定性
制备了用于硬x射线单色仪的氮化Ru/B4C多层膜,并对其进行了退火,分析了其热稳定性。结果表明,氮化多层膜在300℃高温下保持稳定,2年无结构变化。
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