{"title":"Simultaneous Interface Defect Density and Differential Capacitance Imaging by Time-Resolved Scanning Nonlinear Dielectric Microscopy","authors":"K. Yamasue, Yasuo Cho","doi":"10.31399/asm.cp.istfa2021p0441","DOIUrl":null,"url":null,"abstract":"\n We investigate non-uniformity at SiO2/SiC interfaces by time-resolved scanning nonlinear dielectric microscopy, which permits the simultaneous nanoscale imaging of interface defect density (Dit) and differential capacitance (dC/dV) at insulator-semiconductor interfaces. Here we perform the cross correlation analysis of the images with spatially non-uniform clustering distributions reported previously. We show that Dit images are not correlated with the simultaneous dC/dV images significantly but with the difference image between the two dC/dV images taken with different voltage sweep directions. The results indicate that the dC/dV images visualize the non-uniformity of the total interface charge density and the difference images reflect that of Dit at a particular energy range.","PeriodicalId":188323,"journal":{"name":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","volume":"156 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31399/asm.cp.istfa2021p0441","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We investigate non-uniformity at SiO2/SiC interfaces by time-resolved scanning nonlinear dielectric microscopy, which permits the simultaneous nanoscale imaging of interface defect density (Dit) and differential capacitance (dC/dV) at insulator-semiconductor interfaces. Here we perform the cross correlation analysis of the images with spatially non-uniform clustering distributions reported previously. We show that Dit images are not correlated with the simultaneous dC/dV images significantly but with the difference image between the two dC/dV images taken with different voltage sweep directions. The results indicate that the dC/dV images visualize the non-uniformity of the total interface charge density and the difference images reflect that of Dit at a particular energy range.