Capacitors embedded in the low temperature cofired ceramics

Abstract

With the addition of LiF, nonstoichiometric barium titanate can be densified well after sintering at temperatures of less than 1000/spl deg/C, which is compatible with LTCC substrates. From the X-ray diffraction pattern, barium titanate is the main existing crystalline structure. On the observation of the microstructure, no delamination between substrate and capacitor layer is observed after cofiring. Both the capacitance and dissipation factor are stable over the -30/spl deg/C to 150/spl deg/C range.