High-frequency, plano-convex quartz oscillators made by a dual-face lapping machine

Abstract

We considered methods of manufacturing high-frequency quartz oscillators utilizing the advantages of chemical etching, reactive ion etching and mechanical polishing effectively. Consequently, by using single inverted mesa type quartz blanks produced by etching as machining materials, we developed a machining method that can manufacture quartz oscillators whose fundamental frequency is more than 334 MHz (AT-cut) by lapping them with a dual-face lapping machine. The quartz oscillators manufactured with this method serve as piano-convex type oscillators, and show excellent reactance-frequency characteristics.