ESD Protection Design Overview in Advanced SOI and Bulk FinFET Technologies

Abstract

The FinFET era brings new challenges to ESD protection. An overview of ESD design in advanced SOI and bulk FinFET technologies are presented. The design innovations and device optimizations are explored to achieve an effective ESD protection. The predictive ESD modeling and simulations are studied to optimize ESD protection and ensure first-time-right chip ESD design in FinFET technologies.