Digital temperature regulation at fabrication of the communication elements by molecular-beam epitaxy method

Abstract

The control process of the metal vaporizer heating system based on an ordinary IBM-PC computer and controller on a standard IC is considered. The method of parameter reproducibility proposed in the paper is based on digitization of signal and its processing on a microcomputer. It is possible to describe of the reaction of the adjustable variable on the effect change by a Laplace equation with an aperiodic first-order section, at the source of which there is a signal delay.