Digital video disk mastering

J. M. Wijn, R. Alink
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引用次数: 1

Abstract

Mastering refers to the process of forming the original pattern for replicating structures to provide the specified opto-electronic signals. Several technologies have been explored since the start of the optical storage industry. Mechanical cutting, as used in the conventional audio industry, turned out to be unpractical. Mastering dynamics could be best reached by laser beam recording. Literature reveals two types of possible processes for laser beam recording; photo-resist based and non-photoresist (ablative) based technology. The photo-resist technology is based upon a process using well established lithographic technologies. The master disc is composed of a glass substrate on which a layer of photo-resist material has been applied. The submicron sized portions of this photo-resist layer, exposed by the focused laser beam, give the requested opto-electronic structure after development and rinsing of the master substrate. The photo-resist based process is a microscopically localized process. The pit shape depends on the exposure of that area only and no contributions from adjacent spot positions are present. The photo-resist process has proven flexibility towards a large variety of groove and pit shapes. The final pit structure is controlled during the development process by pit-formation monitoring. Non photo-resist mastering deals with forming structures by local heating of specific areas of a substrate covered with an ablative material. The pit formation and the shape of the pit depend strongly on the temperature profile. This pit-formation process depends not only on the (heat) exposure of the laser beam for that given minute portion but also on the heat flow from neighbouring areas. If a nearby area has just been heated, heat will diffuse to that given area and cause a different pit shape. This highly unwanted phenomenon is known in optical recordable systems as "inter symbol interference". In order to prevent uncontrolled pit formation due to this interference from adjacent pits, complex write strategies have to be used. These write strategies are strongly dependent on recording speeds, layer thickness, spot quality and layer quality. In order to certify the performance of this process for its pit characteristics, the pit formation has to be verified by a second read beam. This read laser adds to the systems complexity while its reliability has to be certified systematically. This explains why more complex pit structures, e.q. MO, are preferably realized by the photoresist mastering process.
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掌握是指形成复制结构的原始图案以提供指定的光电信号的过程。自光存储行业开始以来,已经探索了几种技术。传统音频工业中使用的机械切割被证明是不切实际的。通过激光束记录可以最好地掌握动态。文献揭示了两种可能的激光记录过程;光刻胶基和非光刻胶(烧蚀)基技术。光刻胶技术是基于一种使用成熟的光刻技术的工艺。主盘由玻璃基板组成,在其上涂有一层光刻胶材料。该光刻胶层的亚微米尺寸部分,通过聚焦激光束暴露,在显影和冲洗主衬底后,给出了所要求的光电结构。光致抗蚀剂工艺是一种微观局部化工艺。凹坑的形状仅取决于该区域的暴露,而不存在邻近点位置的贡献。光抗蚀剂工艺已经证明了对各种各样的凹槽和凹坑形状的灵活性。在开发过程中,通过对基坑地层的监测来控制最终的基坑结构。非光刻胶母材处理通过局部加热覆盖有烧蚀材料的基板的特定区域来形成结构。坑的形成和坑的形状在很大程度上取决于温度分布。这种凹坑的形成过程不仅取决于激光束在给定的一分钟内的(热)照射,还取决于来自邻近区域的热流。如果附近的区域刚刚被加热,热量将扩散到该给定区域并造成不同的坑形状。这种非常不希望出现的现象在光学可记录系统中称为“符号间干涉”。为了防止由于邻近坑的干扰而形成不受控制的坑,必须使用复杂的写入策略。这些写入策略在很大程度上取决于记录速度、层厚度、光斑质量和层质量。为了验证该工艺的凹坑特性,凹坑的形成必须通过第二读光束进行验证。这种可读激光器增加了系统的复杂性,同时需要对其可靠性进行系统认证。这就解释了为什么更复杂的凹坑结构,如MO,最好通过光刻胶母化工艺来实现。
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