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Scalable patterning modules for diffractive optics on 300mm substrates

Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV Pub Date : 2023-03-16 DOI:10.1117/12.2649739
M. Traub, M. Willegems, Sundararajan Thirumalai, S. Smout, M. Asbahi, Bogumila Kutrzebakotowska, S. Lenci, E. Storace
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用于衍射光学器件在300mm基板上的可扩展图案模块
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Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV
Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) IV
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