L. Hou, Xiaowei Han, W. Shi, Hong Liu, Ming Xu, Cheng Ma
{"title":"Detecting terahertz waves using microplasma array","authors":"L. Hou, Xiaowei Han, W. Shi, Hong Liu, Ming Xu, Cheng Ma","doi":"10.1109/PLASMA.2016.7534084","DOIUrl":null,"url":null,"abstract":"Summary form only given. Terahertz (THz) wave real time imaging has promising applications in the fields of nondestructive examination, security detection and so on, however, the present THz focal plane arrays has many defects. The conventional plasma generated by discharging inert gases using DC bias voltage has been used in THz wave detection. Although the conventional plasma detector can obtain a THz image with high resolution and high contrast by raster scan, the speed is slow2. Due to the big size of conventional plasma, we cannot use them to make a THz imaging array. Micro-plasma is a new kind of plasma, the size of which is from several microns to a millimeter. Compared with the conventional plasma, micro-plasma has higher plasma conventional plasma and higher stability, which are benefit to the THz detection. So micro-plasma is suit to be made of a THz imaging array. In this paper, we fabricated a THz imaging array based on micro-plasma by photolithography and e-beam evaporation. The substrate is glass and the electrodes are made by 400 nm Ti and 1 μm Au. Both the electrode width and the electrode gaps are 1 mm, put it into a gas cell and filled neon with the pressure of 532 torr into the cell. The electrodes were biased by high voltage, and the micro-plasma generated between two adjacent electrodes. A 190 GHz Gunn diode was used as a THz source, and it emitted 40 mW THz continue wave. The THz wave was expanded and collimated to a beam with the diameter of 10 mm and illuminated on the micro-plasma array with the size of 10 mm×10 mm. When the discharge current is 0.55 mA, and the bias voltage is 100 V, the output signal from one of the array elements is about 2 mV. The results indicate that the detecting THz waves using microplasma is feasible.","PeriodicalId":424336,"journal":{"name":"2016 IEEE International Conference on Plasma Science (ICOPS)","volume":"93 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-06-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE International Conference on Plasma Science (ICOPS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLASMA.2016.7534084","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Summary form only given. Terahertz (THz) wave real time imaging has promising applications in the fields of nondestructive examination, security detection and so on, however, the present THz focal plane arrays has many defects. The conventional plasma generated by discharging inert gases using DC bias voltage has been used in THz wave detection. Although the conventional plasma detector can obtain a THz image with high resolution and high contrast by raster scan, the speed is slow2. Due to the big size of conventional plasma, we cannot use them to make a THz imaging array. Micro-plasma is a new kind of plasma, the size of which is from several microns to a millimeter. Compared with the conventional plasma, micro-plasma has higher plasma conventional plasma and higher stability, which are benefit to the THz detection. So micro-plasma is suit to be made of a THz imaging array. In this paper, we fabricated a THz imaging array based on micro-plasma by photolithography and e-beam evaporation. The substrate is glass and the electrodes are made by 400 nm Ti and 1 μm Au. Both the electrode width and the electrode gaps are 1 mm, put it into a gas cell and filled neon with the pressure of 532 torr into the cell. The electrodes were biased by high voltage, and the micro-plasma generated between two adjacent electrodes. A 190 GHz Gunn diode was used as a THz source, and it emitted 40 mW THz continue wave. The THz wave was expanded and collimated to a beam with the diameter of 10 mm and illuminated on the micro-plasma array with the size of 10 mm×10 mm. When the discharge current is 0.55 mA, and the bias voltage is 100 V, the output signal from one of the array elements is about 2 mV. The results indicate that the detecting THz waves using microplasma is feasible.