Detecting terahertz waves using microplasma array

L. Hou, Xiaowei Han, W. Shi, Hong Liu, Ming Xu, Cheng Ma
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Abstract

Summary form only given. Terahertz (THz) wave real time imaging has promising applications in the fields of nondestructive examination, security detection and so on, however, the present THz focal plane arrays has many defects. The conventional plasma generated by discharging inert gases using DC bias voltage has been used in THz wave detection. Although the conventional plasma detector can obtain a THz image with high resolution and high contrast by raster scan, the speed is slow2. Due to the big size of conventional plasma, we cannot use them to make a THz imaging array. Micro-plasma is a new kind of plasma, the size of which is from several microns to a millimeter. Compared with the conventional plasma, micro-plasma has higher plasma conventional plasma and higher stability, which are benefit to the THz detection. So micro-plasma is suit to be made of a THz imaging array. In this paper, we fabricated a THz imaging array based on micro-plasma by photolithography and e-beam evaporation. The substrate is glass and the electrodes are made by 400 nm Ti and 1 μm Au. Both the electrode width and the electrode gaps are 1 mm, put it into a gas cell and filled neon with the pressure of 532 torr into the cell. The electrodes were biased by high voltage, and the micro-plasma generated between two adjacent electrodes. A 190 GHz Gunn diode was used as a THz source, and it emitted 40 mW THz continue wave. The THz wave was expanded and collimated to a beam with the diameter of 10 mm and illuminated on the micro-plasma array with the size of 10 mm×10 mm. When the discharge current is 0.55 mA, and the bias voltage is 100 V, the output signal from one of the array elements is about 2 mV. The results indicate that the detecting THz waves using microplasma is feasible.
利用微等离子体阵列探测太赫兹波
只提供摘要形式。太赫兹波实时成像技术在无损检测、安全检测等领域有着广阔的应用前景,但现有的太赫兹焦平面阵列存在诸多缺陷。利用直流偏置电压放电惰性气体产生的传统等离子体已被用于太赫兹波探测。传统的等离子体探测器虽然可以通过光栅扫描获得高分辨率和高对比度的太赫兹图像,但速度较慢。由于传统等离子体的大尺寸,我们不能用它们来制作太赫兹成像阵列。微等离子体是一种新型等离子体,其尺寸从几微米到一毫米不等。与传统等离子体相比,微等离子体具有更高的等离子体和稳定性,有利于太赫兹探测。因此,微等离子体适合采用太赫兹成像阵列。本文采用光刻和电子束蒸发技术制备了一种基于微等离子体的太赫兹成像阵列。衬底为玻璃,电极由400 nm Ti和1 μm Au制成。电极宽度和电极间隙均为1mm,将其放入气体电池中,并以532 torr的压力填充氖气进入电池中。在高压作用下,电极产生偏置,微等离子体在相邻电极之间产生。采用190ghz的Gunn二极管作为太赫兹源,发射40mw的太赫兹连续波。将太赫兹波扩展并准直成直径为10 mm的光束,照射在尺寸为10 mm×10 mm的微等离子体阵列上。当放电电流为0.55 mA,偏置电压为100 V时,其中一个阵列元件的输出信号约为2 mV。结果表明,利用微等离子体探测太赫兹波是可行的。
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