Relationship between substrate morphology and growth of aligned carbon nanotubes

Abstract

Aligned multi‐walled carbon nanotubes (MWNT) were deposited by bias enhanced microwave chemical vapor deposition on oxidized silicon substrates coated with thin Co layers. The obtained tubes were characterized with respect to the structure and catalyst particle size. No significant difference in size between the particles on the substrate after a plasma treatment and the particles included in the tubes after the deposition process was observed. Two structure types (tubular and bamboo‐like) were detected and reasons for their formation are discussed.