Laser beam stability control based on differential compensation system

Hongwei Yang, Lidong Lu
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引用次数: 1

Abstract

This paper proposes a differential compensation system with a differential optical path which is consisted of a pentaprism, a half-pentaprism and a beam splitter. This system can split the source laser beam into two equal and opposite laser beams without considering the thickness of the beam splitter. Thus the average of the positions of the two laser beams remains constant despite the laser beam dithering angle. Simulations verify the feasibility of this system in ideal situation. Furthermore, the compensation error is analyzed taking into account the thickness of the beam splitter. Theoretical analysis shows that the system error is within 6 μm. Monte Carlo simulation are then verified that the collimated laser beam dithering can be reduced within 7 μm considering the machining error of the parameters of the prisms and the system error. This system with advantages of compact structure, free from electro magnetic interference(EMI) and transplantation, is wildly used in one dimensional measurement fields especially for the compact and containment detecting setup.
基于微分补偿系统的激光束稳定性控制
本文提出了一种由五棱镜、半五棱镜和分束器组成的微分光路补偿系统。该系统可以在不考虑分束器厚度的情况下,将源激光束分割成两个大小相等、方向相反的激光束。因此,尽管激光束抖动角度不同,但两束激光束位置的平均值保持不变。仿真验证了该系统在理想情况下的可行性。在此基础上,分析了考虑分束器厚度的补偿误差。理论分析表明,系统误差在6 μm以内。通过蒙特卡罗仿真验证了在考虑棱镜参数加工误差和系统误差的情况下,准直激光束抖动可以减小到7 μm以内。该系统具有结构紧凑、不受电磁干扰和可移植性等优点,在一维测量领域得到了广泛的应用,尤其适用于紧凑、密闭的检测装置。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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