Surface profiling measurement using varifocal lens based on focus stacking

Abstract

In this study, we developed a 3D surface profiling technique based on a varifocal lens and focus-stacking method that uses a high-pass filter in conjunction with a focus algorithm. The varifocal lens was used in conjunction with a CCD camera to capture images of samples from various distances. The focus stacking method was then used to construct a surface profile and the image with large depth-of-filed.