An Integrated SiC Photo-Transistor for Ultraviolet Detection in High-Temperature Environments

J. Holmes, M. Francis, N. Chiolino, M. Barlow, S. Perez, I. Getreu
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引用次数: 1

Abstract

The work described herein applies a patented integrated silicon carbide (SiC) bipolar junction transistor (BJT) to the detection of ultraviolet (UV) light in situ for extreme-temperature environments. An integrated SiC BJT provides four important capabilities for UV detection in extreme environments: (1) The miniaturization of detectors and readout circuits through micron-scaled integrated circuit (IC) lithography; (2) the high-temperature operation of SiC ICs; (3) long-term reliability of SiC at high temperatures; and (4) the deep-UV responsivity of 4H-SiC. The design, manufacture and electrical characterization of a SiC photo-transistor is described. Photonic characterization of the photo-transistor responsivity in the vacuum ultraviolet (VUV) and near UV is analyzed. It will be shown that integration of the photo-transistor with SiC CMOS [1] advances the state-of-the-art to a photo-BiCMOS capability. The advancement of the state of the art is validated in both terrestrial and space-born applications, specifically (1) the patent-pending detection of the ultraviolet signature produced by the charge-compression auto-ignition of diesel fuel in a working 4-stroke engine, and (2) the measurement of Solar UV intensity in Low-Earth Orbit (LEO).
用于高温环境下紫外探测的集成碳化硅光晶体管
本文所述的工作将专利集成碳化硅(SiC)双极结晶体管(BJT)应用于极端温度环境下的紫外(UV)光原位检测。集成的SiC BJT为极端环境下的紫外检测提供了四个重要功能:(1)通过微米级集成电路(IC)光刻技术实现探测器和读出电路的小型化;(2) SiC ic的高温操作;(3) SiC在高温下的长期可靠性;(4) 4H-SiC的深紫外响应度。介绍了一种碳化硅光晶体管的设计、制造和电学特性。分析了光晶体管在真空紫外和近紫外下响应性的光子特性。它将表明,光电晶体管与SiC CMOS[1]的集成推进了最先进的光电bicmos能力。这项技术的进步在地面和太空应用中都得到了验证,特别是(1)正在申请专利的四冲程发动机中柴油燃料的电荷压缩自动点火产生的紫外线特征检测,以及(2)近地轨道(LEO)太阳紫外线强度的测量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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