Gas sensor array based on surface acoustic wave devices for rapid multi-detection

2012 IEEE Nanotechnology Materials and Devices Conference (NMDC2012) Pub Date : 2012-10-01 DOI:10.1109/NMDC.2012.6527578

Ming-Chang Chiang, H. Hao, C. Hsiao, Szu-Chieh Liu, Chia‐Min Yang, K. Tang, D. Yao

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引用次数: 7

Abstract

A surface acoustic wave (SAW) sensor array was developed for sensing amino gas. Poly-N-vinylpyrrolidone (PNVP) composite film as a sensitive interface material was deposited onto a 128° YX-LiNbO3 substrate by the spin coating technique. Moreover, we have developed an improved portable electronic noise based on a 2×2 non-continuously working oscillators equipped with coated SAW sensor array. This gas sensor array system consists of SAW sensors, polymers with different polarity of function groups, signal readout electronics with quick connector, miniature sensing chamber made by acrylic, and aluminum plates. The adsorption of amino gas by the sensitive coating material modulates the phase velocity of the acoustic wave due to the mass loading and acoustoelectric effect. Thus, the targeted amino gas can be evaluated by recording the frequency shift of the SAW device. The fast response time (49 s) and recovery time (64 s), and larger frequency response of 800 Hz were observed from the fabricated SAW sensor under 150 ppm concentration of amino gas. The detection response and large frequency shift have been improved under current generation of SAW sensing array system.

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基于表面声波装置的气体传感器阵列快速多重探测

研制了一种表面声波(SAW)传感器阵列，用于检测氨基气体。采用自旋镀膜技术将聚- n -乙烯基吡咯烷酮(PNVP)复合薄膜作为敏感界面材料沉积在128°YX-LiNbO3衬底上。此外，我们还开发了一种基于2×2非连续工作振荡器的改进便携式电子噪声，该振荡器配备了涂层SAW传感器阵列。该气体传感器阵列系统由SAW传感器、不同极性官能团聚合物、带快速连接器的信号读出电子器件、丙烯酸制成的微型传感室和铝板组成。敏感涂层材料对氨基气体的吸附，由于质量载荷和声电效应，调节了声波的相速度。因此，可以通过记录SAW器件的频移来评估目标氨基气体。在150 ppm的氨气条件下，SAW传感器的响应时间和恢复时间分别达到了49 s和64 s，频率响应达到了800 Hz。现有声表面波传感阵列系统的检测响应和大频移都得到了改善。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2012 IEEE Nanotechnology Materials and Devices Conference (NMDC2012)

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