Room temperature deposition of zinc oxide thin films by rf-magnetron sputtering for application in solar cells

Sanal K. C., R. R. Trujillo, P. K. Nair, M. Nair
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Abstract

Recent reports indicate that thin films of oxides of zinc: ZnO, Zn(O,S), or Zn-Mg-O, could be a better buffer component than CdS to provide an adequate band alignment with orthorhombic tin sulphide in thin lm solar cells. Thin films of ZnO were grown by rf-magnetron sputtering on different substrates at room temperature. Thin films of ZnO obtained by different deposition methods show hexagonal crystal structure, usually with a preferential orientation of (002) crystallographic planes parallel to the substrate surface. However, in the present study XRD patterns indicate that thicker ZnO films on glass substrates have preferential growth of (103) planes, while that on chemically deposited CdS or ZnS films preferential orientation of (002) planes persists. Bandgap of ZnO films increases from 3.2 eV to 3.4 eV when the chamber pressure used for deposition varies from 2.3 mTorr to 6 mTorr. ZnO films were incorporated in a solar cell structure stainless steel/SnS(cubic)/SnS(orthorhombic)/SnS(cubic)/CdS/ZnO/ZnO:Al. It showed open-circuit voltage of 0.318 V, short-circuit current density of 3.6 mA/cm2 and conversion efficiency of 0.82%.
室温磁控溅射沉积氧化锌薄膜在太阳能电池中的应用
最近的报道表明,锌氧化物薄膜:ZnO, Zn(O,S),或Zn- mg -O,可以作为比CdS更好的缓冲成分,在薄膜太阳能电池中提供与正交硫化锡足够的波段对齐。在室温下,采用射频磁控溅射法在不同的衬底上生长ZnO薄膜。不同沉积方法制备的ZnO薄膜均呈现六角形晶体结构,通常以平行于衬底表面的(002)晶面为优先取向。然而,在本研究中,XRD图谱表明,在玻璃衬底上较厚的ZnO薄膜具有(103)平面的优先生长,而在化学沉积的CdS或ZnS薄膜上仍然具有(002)平面的优先取向。当室压为2.3 ~ 6 mTorr时,ZnO薄膜的带隙从3.2 eV增大到3.4 eV。采用不锈钢/SnS(立方)/SnS(正交)/SnS(立方)/CdS/ZnO/ZnO:Al制备了ZnO薄膜。开路电压为0.318 V,短路电流密度为3.6 mA/cm2,转换效率为0.82%。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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