A Tapered Intrinsic Fabry-Perot Interferometer Fabricated by a CO2 Laser and its Application as a Refractive Index Sensor

Abstract

We present a highly reproducible method of fabricating a tapered intrinsic Fabry-Perot interferometer device with 6-µm taper waist through an integrated femtosecond and CO2 laser approach. This device demonstrates a minimal refractive index sensing resolution ~2×10-5.