Metallization of beryllia ceramics for microelectronic use

J. A. DeVore
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Abstract

Within the last decade and especially in the last two years, the use of beryllia as an electronic substrate material has risen dramatically. One reason for this has been the development of high power devices which require electrical isolation. Another reason has been the demand for high packaging densities. Both of these reflect a need to remove heat from the device efficiently.
微电子用铍陶瓷的金属化
在过去的十年里,特别是在过去的两年里,铍作为电子衬底材料的使用急剧增加。其中一个原因是需要电隔离的高功率设备的发展。另一个原因是对高封装密度的需求。这两种情况都反映出需要有效地从设备中除去热量。
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