A novel 2D piezo-nanopositioning stage based on triangle amplifier mechanism

2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Pub Date : 2016-10-01 DOI:10.1109/SPAWDA.2016.7830013

Xuewen Liu, Weiqing Huang, Yin Wang

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引用次数: 4

Abstract

Due to their high resolution and positioning accuracy, piezo-nanoposititioning stages are widely used in precision and ultra-precision fields. A nano-positioning platform with large travel range and bidirectional symmetrical output characteristic is proposed. Theoretical static model develops the relationships among output force, displacement, static stiffness and the structure parameters of the platform. Static analysis of the platform is carried out by ANSYS workbench. Finally, the theoretical and the finite element models are confirmed by experiments. The experimental results of the prototype show that the output performances in X and Y direction are similar and both of them are within an 8% deviation from the theoretical value. The stroke of the stage reaches to 41.6μm and 42.9μm in X and Y directions respectively and is directly proportional to the amplitude of the input sinusoidal voltage of 10Hz. The minimum output displacement step is 50nm. The nano-positioning stage designed is featured with bidirectional symmetrical output characteristic and millisecond starting characteristic, with high positioning precision.

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一种基于三角放大机构的二维压电纳米定位平台

压电纳米定位平台由于具有较高的分辨率和定位精度，在精密和超精密领域得到了广泛的应用。提出了一种具有大行程和双向对称输出特性的纳米定位平台。理论静力模型建立了平台的输出力、位移、静刚度与结构参数之间的关系。利用ANSYS workbench对平台进行静力分析。最后，通过实验对理论模型和有限元模型进行了验证。样机的实验结果表明，在X和Y方向上的输出性能相似，与理论值的偏差都在8%以内。在X和Y方向上，工作台行程分别达到41.6μm和42.9μm，与输入正弦电压10Hz的幅值成正比。最小输出位移步长为50nm。所设计的纳米定位台具有双向对称输出特性和毫秒启动特性，定位精度高。

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2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)

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