A 0.18 μm CMOS Capacitive Detection Lab-on-Chip

Abstract

In this paper, we put forward a CMOS-based capacitive interface circuit for lab-on-chip applications. This simple capacitive detector is implemented in the TSMC 0.18 CMOS process to which we incorporate microfluidic channels. In addition, we address the often-neglected challenges of microfluidic packaging for integrated biochemical sensors by proposing an efficient direct-write microfluidic packaging procedure. The simulation, fabrication and preliminary measurement results are also presented and discussed.