Application of piezo-driven polymer microgripper in automatic transportation of micro object

Abstract

A compliant microgripper system is designed, fabricated, and tested. The gripper mechanism is optimized to achieve design objectives. By employing excimer-laser ablation, a polyurethane microgripper is fabricated. The input-output behavior of microgripper mechanism is analyzed by FEA and compared with experimental testing. The microgripper driven by piezoelectric actuator is finally integrated and the operational behavior is identified. The application of holding and transporting a wire (200 mum) is finally tested.