Plasma polymerization: A new process for electronics

Abstract

Plasma polymerization or glow discharge polymerization is a technique for producing unique, pinhole free, thin polymeric films. The monomers that can be used in this technique need not have a formally polymerizable structure: hence they cannot be polymerized by other, more conventional techniques. In this paper, we will review the process and mechanism of plasma polymerization, as well as discuss applications for such films in the areas of protective coatings for microcircuitry, and anti-reflective coatings for photo-voltaic solar cells.