Fluctuations of ultrasonic transducer vibration measurement quadrature interferometer for transducer vibration measurement

P. Škarvada, P. Tománek, L. Grmela, P. Tofel, M. Ševčík, R. Macku
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Abstract

Langevin type transducers are being used by reason of the high transmitting power capability for various purposes. The peak-to-peak value of the transducer mechanical oscillation is in order of tens of the nanometers (for the resonant frequency and two ring transducer). Transducer vibration parameters depend considerably on excitation voltage and frequency. Beyond the resonant frequency some parasitic resonance frequencies are produced. Precise measurement of vibration with nanometer accuracy in the range of the ultrasonic frequencies can be done with using optical interferometry. Results show high distortion of the transducer displacement waveforms and poor amplitude stability.
超声换能器波动振动测量正交干涉仪用于换能器振动测量
朗格万型换能器由于具有较高的发射功率而被广泛应用于各种用途。换能器的机械振荡峰值在几十纳米量级(谐振频率和双环换能器)。换能器的振动参数在很大程度上取决于激励电压和频率。在共振频率之外,产生一些寄生共振频率。利用光学干涉测量技术可以在超声频率范围内精确测量纳米级的振动。结果表明,换能器位移波形畸变大,振幅稳定性差。
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