L. Perner, G. Winkler, G. Truong, D. Follman, J. Fellinger, Maximilian Prinz, S. Puchegger, G. Cole, O. Heckl
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引用次数: 1
Abstract
We report a method to measure the refractive index of two or more materials in as-deposited thin-film structures by analysis of FTIR transmittance spectra and extraction of layer thicknesses via SEM, yielding excellent results for a GaAs/AlGaAs DBR.
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