Case study: Laser nanoscale manufacturing (LaserNaMi)

Abstract

This project focuses on staff exchanging between the partners, especially between the partners of EU and China, on the researching and developing newmaskless laser nanoscale manufacturing technologies for low cost and high efficiency manufacturing of nano structured surfaces and components including periodic structures (nano gratings, anticounterfeiting security markers, nanoimprint templates, self-cleaning, antireflection surface nanostructures, and nano sensors) and other arbitrary features for both 2D and 3D applications. The target feature size will be down to ~10 nm in the selected applications for maskless laser nanoscale manufacturing.