Socot Project (scatterometry for integrated circuits defectoscopy)

Abstract

SOCOT is a Specific Targeted Research Project. Its full title reads: scatterometry overlay control technology in the integrated circuit industry for the 32 nm technology node and beyond. The project concerns definition and validation of an optimal methodology that will allow overlay control in semiconductor industry. The imaging technology currently used for that purpose may not be sufficiently accurate for the 32 nm technology node. The transition to the 32 nm technology is therefore at risk along with the profitability of the semiconductor industry.