Synthesis, characterizations and gas sensing properties of nanocrystalline In2O3 thick film sensor

R. H. Bari, D. Chavan, G. Jain
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Abstract

The nanocrystalline powder of In2O3 with cubic structure prepared by a simple hydrothermal decomposition route. The structure and crystal phase of the powder was characterized by X-ray diffraction (XRD), microstructure by Transmission Electron Microscopy (TEM). The results indicated that the indium oxide was cubic with range size 28.5– 65.8 nm. Gas sensing properties of the nanocrystalline In2O3 thick film sensor were tested for various gases in air at static state. The tested results showed that the sensor based on In2O3 nanocrystals exhibited high response towards H2S gas (40 ppm) at an operating temperature 100°C. The selectivity of the sensor elements for H2S gas against different gases was studied. The results on response and recovery time were also discussed.
纳米晶In2O3厚膜传感器的合成、表征及气敏性能
采用简单的水热分解法制备了立方结构的纳米In2O3粉体。采用x射线衍射(XRD)和透射电子显微镜(TEM)对粉末的结构和晶相进行了表征。结果表明,所制得的氧化铟呈立方状,粒径范围为28.5 ~ 65.8 nm。在静态状态下,测试了纳米晶In2O3厚膜传感器对空气中各种气体的气敏性能。测试结果表明,在工作温度为100℃时,基于In2O3纳米晶的传感器对H2S气体(40 ppm)有较高的响应。研究了传感器元件对H2S气体对不同气体的选择性。讨论了响应和恢复时间的结果。
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