A software system architecture for testing multiple part number wafers

R. M. Smyczynski, K. Brennan
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Abstract

Testing single part number wafers is the normal mode of testing semiconductor devices in the industry today. However, as wafers get larger it may become more economical to put different devices on the same wafer resulting in multiple part number wafers. The authors describe a system architecture that allows for the testing of such wafers.<>
用于测试多零件号晶圆的软件系统架构
测试单个零件号晶圆是当今工业中测试半导体器件的正常模式。然而,随着晶圆越来越大,在同一晶圆上放置不同的设备可能会变得更加经济,从而产生多个零件编号的晶圆。作者描述了一种允许测试这种晶圆的系统架构。
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