Development of optically immersed, near-room-temperature HgCdTe photovoltaic detectors

H. Qiao, Reng Wang, Cuiling Jiao, Wei Gong, Xiang-yang Li
{"title":"Development of optically immersed, near-room-temperature HgCdTe photovoltaic detectors","authors":"H. Qiao, Reng Wang, Cuiling Jiao, Wei Gong, Xiang-yang Li","doi":"10.1117/12.2180099","DOIUrl":null,"url":null,"abstract":"Optically immersed HgCdTe photovoltaic detectors in the 2.5 to 3.2 μm wavelength region operating at near room temperatures have been developed based on HgCdTe graded structure materials grown by opened tube isothermal vapor phase epitaxy (ISOVPE) method on lattice matched CdZnTe substrate. Fourier transformation infrared spectroscopy (FTIR) measurement combined with continuous step wet etching was applied to adjust the cutoff wavelength. The devices were designed and fabricated by traditional n-on-p planar junction process. Optical immersion of micro-lenses by CdZnTe substrate was used to improve the performance of the devices and the hyper-hemispherical micro-lens with a diameter of 1.5mm was made by single point diamond turning method. The optical response area was tested by laser beam induced current (LBIC) scanning measurement, and the result showed that the devices with hyper-hemispherical immersion micro-lens could get a 1mm×1mm response area as designed. The current-voltage characteristic of the devices were measured, and all the devices showed a little increase in the values of zero biased resistance, which was due to a decreased background radiation acceptance angle caused by a hyper-hemispherical structure. The photo response signal and dark noise were also measured before and after the micro-lens fabrication. The signal showed an increase by 20-30 times due to the enlarged photo response area, and the dark noise showed a little decrease which was also due to a limited background radiation acceptance angle. As a result, a multiple factor of four in detectivity enhancement could be achieved by the adoption of hyper-hemispherical immersion micro-lens structures.","PeriodicalId":225534,"journal":{"name":"Photoelectronic Technology Committee Conferences","volume":"255 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Photoelectronic Technology Committee Conferences","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2180099","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

Abstract

Optically immersed HgCdTe photovoltaic detectors in the 2.5 to 3.2 μm wavelength region operating at near room temperatures have been developed based on HgCdTe graded structure materials grown by opened tube isothermal vapor phase epitaxy (ISOVPE) method on lattice matched CdZnTe substrate. Fourier transformation infrared spectroscopy (FTIR) measurement combined with continuous step wet etching was applied to adjust the cutoff wavelength. The devices were designed and fabricated by traditional n-on-p planar junction process. Optical immersion of micro-lenses by CdZnTe substrate was used to improve the performance of the devices and the hyper-hemispherical micro-lens with a diameter of 1.5mm was made by single point diamond turning method. The optical response area was tested by laser beam induced current (LBIC) scanning measurement, and the result showed that the devices with hyper-hemispherical immersion micro-lens could get a 1mm×1mm response area as designed. The current-voltage characteristic of the devices were measured, and all the devices showed a little increase in the values of zero biased resistance, which was due to a decreased background radiation acceptance angle caused by a hyper-hemispherical structure. The photo response signal and dark noise were also measured before and after the micro-lens fabrication. The signal showed an increase by 20-30 times due to the enlarged photo response area, and the dark noise showed a little decrease which was also due to a limited background radiation acceptance angle. As a result, a multiple factor of four in detectivity enhancement could be achieved by the adoption of hyper-hemispherical immersion micro-lens structures.
光浸式近室温HgCdTe光电探测器的研制
采用开管等温气相外延(ISOVPE)方法在晶格匹配的CdZnTe衬底上生长HgCdTe梯度结构材料,研制了在近室温下工作的2.5 ~ 3.2 μm波长区域的光浸式HgCdTe光伏探测器。采用傅里叶变换红外光谱(FTIR)测量结合连续阶跃湿法刻蚀来调节截止波长。该器件采用传统的n-on-p平面结工艺设计和制作。为了提高器件的光学性能,采用CdZnTe衬底对微透镜进行光学浸没,并采用单点金刚石车削法制备了直径为1.5mm的超半球面微透镜。采用激光束感应电流(LBIC)扫描测量方法对光学响应区域进行了测试,结果表明,超半球面浸没式微透镜器件的响应区域达到了设计要求的1mm×1mm。测量了器件的电流-电压特性,所有器件的零偏置电阻值都略有增加,这是由于超半球形结构导致背景辐射接受角减小所致。测量了微透镜制作前后的光响应信号和暗噪声。由于放大了光响应面积,信号增加了20-30倍,而暗噪声略有下降,这也是由于背景辐射接受角有限。结果表明,采用超半球面浸没微透镜结构可实现4倍的探测增强。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信