Organic/inorganic hybrid gate dielectric for high-performance and low-power organic thin-film transistors

W. Shin, Hanul Moon, S. Yoo, B. Cho
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Abstract

High-performance and low-voltage OTFTs have been demonstrated by employing a multilayer dielectric structure where ultrathin PVP (8 nm) is coated on (op of high-κ HfLaO (20 nm). The multilayer dielectric exhibited a low leakage current density of 4.6×10−8 A/cm2 at −3 V while maintaining a high capacitance density of 340 nF/cm2. The device with the multilayer dielectric showed superior performance as compared to that of the device with single HfLaO (20 nm) dielectric such as a low threshold voltage (VT) of 0.5 V, a low subthreshold slope (SS) of 0.09 V/decade, a high on-off current ratio (Ion/Ioff) of 5×105 and a saturation mobility (μSAT) of 0.34 cm2V×1s−1 along with a low operating voltage of −2 V. Due to the enhanced μSAT with the high gate capacitance of the device with multilayer dielectric, we also achieved a high μSATCox of 114 nF/Vs, thereby leading to superior drain current drivability.
用于高性能和低功耗有机薄膜晶体管的有机/无机杂化栅极电介质
采用多层介电结构,在高κ HfLaO (20 nm)上涂覆超薄PVP (8 nm),证明了高性能和低压otft。该多层介质在−3 V时的漏电流密度为4.6×10−8 a /cm2,同时保持了340 nF/cm2的高电容密度。与单HfLaO (20 nm)介质器件相比,具有多层介质的器件表现出较好的性能,如低阈值电压(VT)为0.5 V,低亚阈值斜率(SS)为0.09 V/decade,高通断电流比(Ion/Ioff)为5×105,饱和迁移率(μSAT)为0.34 cm2V×1s−1,工作电压为−2 V。由于多层介质器件的高栅极电容增强了μSAT,我们还获得了114 nF/Vs的高μSATCox,从而获得了优异的漏极电流驱动性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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