{"title":"Organic/inorganic hybrid gate dielectric for high-performance and low-power organic thin-film transistors","authors":"W. Shin, Hanul Moon, S. Yoo, B. Cho","doi":"10.1109/NANO.2010.5697845","DOIUrl":null,"url":null,"abstract":"High-performance and low-voltage OTFTs have been demonstrated by employing a multilayer dielectric structure where ultrathin PVP (8 nm) is coated on (op of high-κ HfLaO (20 nm). The multilayer dielectric exhibited a low leakage current density of 4.6×10<sup>−8</sup> A/cm<sup>2</sup> at −3 V while maintaining a high capacitance density of 340 nF/cm<sup>2</sup>. The device with the multilayer dielectric showed superior performance as compared to that of the device with single HfLaO (20 nm) dielectric such as a low threshold voltage (V<inf>T</inf>) of 0.5 V, a low subthreshold slope (SS) of 0.09 V/decade, a high on-off current ratio (I<inf>on</inf>/I<inf>off</inf>) of 5×10<sup>5</sup> and a saturation mobility (μ<inf>SAT</inf>) of 0.34 cm<sup>2</sup>V<sup>×1</sup>s<sup>−1</sup> along with a low operating voltage of −2 V. Due to the enhanced μ<inf>SAT</inf> with the high gate capacitance of the device with multilayer dielectric, we also achieved a high μ<inf>SAT</inf>C<inf>ox</inf> of 114 nF/Vs, thereby leading to superior drain current drivability.","PeriodicalId":254587,"journal":{"name":"10th IEEE International Conference on Nanotechnology","volume":"18 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"10th IEEE International Conference on Nanotechnology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO.2010.5697845","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
High-performance and low-voltage OTFTs have been demonstrated by employing a multilayer dielectric structure where ultrathin PVP (8 nm) is coated on (op of high-κ HfLaO (20 nm). The multilayer dielectric exhibited a low leakage current density of 4.6×10−8 A/cm2 at −3 V while maintaining a high capacitance density of 340 nF/cm2. The device with the multilayer dielectric showed superior performance as compared to that of the device with single HfLaO (20 nm) dielectric such as a low threshold voltage (VT) of 0.5 V, a low subthreshold slope (SS) of 0.09 V/decade, a high on-off current ratio (Ion/Ioff) of 5×105 and a saturation mobility (μSAT) of 0.34 cm2V×1s−1 along with a low operating voltage of −2 V. Due to the enhanced μSAT with the high gate capacitance of the device with multilayer dielectric, we also achieved a high μSATCox of 114 nF/Vs, thereby leading to superior drain current drivability.