Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform

Abstract

The thermal motion of a vacuum packaged, sus-pended nano-beam and nanophotonic waveguide on a silicon photonics-MEMS platform is measured. The resonance frequency and Q-factor of the observed mechanical modes are determined. We also experimentally estimate the displacement sensitivity to be $1.779 \pm 0.022\frac{{{\text{fm}}}}{{\sqrt {{\text{Hz}}} }}$.