Robust Topology Optimization for Foundry-Photonics Inverse Design: Examining Compact and Arbitrary Power Splitters

A. Hammond, J. Slaby, Gareeyasee Saha, S. Ralph
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Abstract

We present a novel framework for robust inverse-design of semiconductor-foundry devices tolerant to standard fabrication variability. We designed and tested compact 50/50, 90/10, and 99/1 power splitters sampled across multiple wafers on a commercial silicon photonic process, demonstrating < ±2% deviation over 100 nm of bandwidth.
用于晶圆光电逆设计的稳健拓扑优化:检查紧凑和任意功率分路器
我们提出了一种新的框架,用于抗标准制造变异性的半导体铸造器件的鲁棒反设计。我们设计并测试了紧凑的50/50、90/10和99/1功率分配器,在商业硅光子工艺上跨多个晶圆采样,在100 nm带宽上显示<±2%的偏差。
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