Finite Element Analysis of thickness shear crystals with surface irregularities

D. Puccio, E. P. Eernisse
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引用次数: 1

Abstract

This work is a continuation of an earlier study on drive level dependence (DLD), wherein the resistance of a thickness-shear crystal changes at low drive levels as the drive level changes. The earlier work used a 2-D Finite Element Analysis (FEA) to show that a surface irregularity, such as an attached particle, causes rotational imbalance in the motion of a contoured thickness-shear crystal, which transfers motional energy from the trapped shear motion to flexural motion. The flexural motion transports motional energy to the mounts. Degradation in the Q due to this increased edge motion was inferred. This degradation in Q was strongly dependent on the location of the surface irregularity in the 2-D FEA model. The present work extends the analysis to 3-D FEA using an SC resonator along with a four-point clip mount with polyimide bonding agent. Damped eigenfrequency analysis is used to include loss in the mounting structure and directly calculate eigenmode Q as a function of the location of an attached particle on the resonator surface. The results are very informative. A 4.0E-11 kg mass can change the Q by up to 30%. The magnitude of the effect is strongly dependent on the lateral location of the mass on the surface. For example, the magnitude of the effect can change significantly between two points on the blank surface only 20 microns apart.
表面不规则厚度剪切晶体的有限元分析
这项工作是对驱动电平依赖(DLD)的早期研究的延续,其中厚度剪切晶体的电阻随着驱动电平的变化而在低驱动电平发生变化。早期的工作使用二维有限元分析(FEA)表明,表面的不规则性,如附着的粒子,会导致轮廓厚度剪切晶体运动中的旋转不平衡,从而将运动能量从捕获的剪切运动转移到弯曲运动。弯曲运动将运动能量传递给支架。由于这种增加的边缘运动,推断出Q的退化。这种Q的退化强烈依赖于二维有限元模型中表面不规则的位置。目前的工作将分析扩展到三维有限元分析,使用SC谐振器以及带有聚酰亚胺粘合剂的四点夹安装。采用阻尼本征频率分析将安装结构中的损耗包括在内,并直接计算本征模态Q作为附着粒子在谐振器表面位置的函数。研究结果非常有用。一个4.0E-11公斤的质量可以改变Q高达30%。这种影响的大小很大程度上取决于物体在地表上的横向位置。例如,在空白表面上相距仅20微米的两点之间,效果的大小可以发生显著变化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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