Torsional mirror driven by a cantilever beam integrated with 1×10 individually biased PZT array actuator for VOA application

Abstract

A gold coated silicon mirror (5mm × 5mm) actuated by 1×10 piezoelectric Pb(Zr, Ti)O3 (PZT) array actuator integrated on a cantilever beam has been demonstrated for variable optical attenuator (VOA) application. Torsional attenuation based on the difference in the dc biasing voltage applied to the 1×10 PZT array actuator was investigated. The dynamic attenuation range of 40dB at 1.8V DC bias is observed in the attenuation curve.