Microfabrication of multi-layered electrodes for dielectrophoresis-based field flow fractionation

Abstract

This article details the process layout required for realizing a three-dimensional arrangement of electrodes in a microfluidic device for field flow fractionation based on dielectrophoresis. The metal electrodes are placed horizontally, in a stair-case arrangement, and pass through the bulk of the fluid. Several standard microfabrication processes are employed, in realizing this microdevice, including multi-layer photolithography, casting and plasma bonding. Thus the process layout is repeatable and reproducible. The feasibility of this process layout is demonstrated using three electrodes arranged in aforementioned manner; nevertheless, this process can be extended to as many electrodes as desired in the horizontal direction. This process layout can will make applications possible that were not possible till date due to the inability in microfabricating three-dimensional horizontal metal electrodes that run through the entire width of the microchannel.