Verilog-AMS model of mechanical component of integrated angular velocity microsensor for schematic design level

Abstract

Verilog-AMS model of mechanical module of integrated angular velocity microsensor has been developed. Using the developed model the drive and sense vibrations of the sensitive element, capacity changes, changes of output voltages and currents, and sensitivity of the mechanical component of the integrated microsensor depending on the applied angular velocity can be performed. The behavioral analysis of the mechanical component of the integrated device at the schematic design level can be carried out as well.