Ozone sensing properties of NbO2 thin films for health and safety applications

Abstract

This work investigates the ozone sensing properties of NbO2 thin films operating at room temperature. NbO2 thin films have been deposited on alumina and glass substrates provide with Cu interdigitated electrodes by the Vacuum Thermal Evaporation technique. The optical properties of NbO2 thin films were explored using CARY IE UV-Visible Spectrophotometer. The values of the optical band gap EOPT are estimated in view of the Mott and Davis' theory. The electrical response has been measured by exposing the sensing layers to ozone (ppb). NbO2 films fabricated by this method have shown good sensitivity to environmentally relevant ozone concentrations.