A. S. Syrneva, V. V. Chesnokov, Dimetriy V. Checnokov
{"title":"Radiation filters for the terahertz range using total internal reflection phenomenon","authors":"A. S. Syrneva, V. V. Chesnokov, Dimetriy V. Checnokov","doi":"10.1109/INTERNANO.2009.5335624","DOIUrl":null,"url":null,"abstract":"The optical filter under development employing frustrated total internal reflection is a micro-mechanical device containing two silicon rectangular prisms. There is a flat silicon plane among hypotenuse edges of the prisms. The silicon plane is a Fabry-Perot resonator, with clearances h<inf>1</inf> among the plate and prism edges being its mirrors. Theoretical resolution of the optical filter would be R ≈ 1,5·10<sup>3</sup> if h<inf>1</inf>= 50 µm and R ≈ 3·10<sup>5</sup> if h<inf>1</inf> = 100 µm with the thickness of the silicon plane being h = 65 µm; wavelength λ = 100 µm; free spectral region Δλ/λ ≈ 0,3…0,4, transmission in the maximum of spectral characteristics 0,6 (provided input and output silicon prism legs bloom).","PeriodicalId":376370,"journal":{"name":"2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies","volume":"21 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-11-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INTERNANO.2009.5335624","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The optical filter under development employing frustrated total internal reflection is a micro-mechanical device containing two silicon rectangular prisms. There is a flat silicon plane among hypotenuse edges of the prisms. The silicon plane is a Fabry-Perot resonator, with clearances h1 among the plate and prism edges being its mirrors. Theoretical resolution of the optical filter would be R ≈ 1,5·103 if h1= 50 µm and R ≈ 3·105 if h1 = 100 µm with the thickness of the silicon plane being h = 65 µm; wavelength λ = 100 µm; free spectral region Δλ/λ ≈ 0,3…0,4, transmission in the maximum of spectral characteristics 0,6 (provided input and output silicon prism legs bloom).