Advanced integrated sensor and layer transfer technologies for wearable bioelectronics

Abstract

We discuss two emerging technologies that are central for realizing an optically powered flexible bioelectronic system. First, we discuss layer transfer through controlled spalling technology for producing high-performance flexible electronics. We present three examples: (1) advanced-node ultra-thin body silicon integrated circuits on plastic, (2) strain engineering in flexible electronics, and (3) flexible GaAs photovoltaic energy harvesters. Second, a 4-terminal biosensor is presented that is compatible with ultra-thin body silicon CMOS technology. Through in vitro glucose sensing, we demonstrate that the 4-terminal integrated biosensor enables the amplification of biochemical signals at the device level. These advanced technologies can give rise to an unprecedented boost in the performance and functionality of next-generation wearable devices.