V(x,t) acoustic microscopy method for leaky surface acoustic waves parameters measurements

S. Titov, R. Maev
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引用次数: 11

Abstract

In this paper, a new method for the measurement of the acoustical parameters of the laterally uniform specimen is considered. Two focused large angular aperture transducers are used in this technique. Foci of the transducers are placed on the specimen surface and received voltage V(x,t) is acquired during the relative transducers translation along the specimen surface. Due to geometry of the ultrasonic system, angular range of the generated and detected waves can be close to (0, /spl pi//2) and the length of the recording distance is unlimited. Velocity and attenuation of the leaky wave measured by this method do not depend on the temperature of the immersion liquid. Also, contrary to V(z) method, angular resolution of the V(x,t) method is better for small incident angles.
V(x,t)声学显微法测量泄漏表面声波参数
本文提出了一种测量横向均匀试样声学参数的新方法。该技术采用两个聚焦大角孔径换能器。换能器的焦点放置在试样表面,在沿试样表面的相对换能器平移过程中获得接收电压V(x,t)。由于超声波系统的几何结构,产生和检测到的波的角度范围可以接近于(0,/spl pi//2),记录距离的长度是无限的。用这种方法测得的泄漏波的速度和衰减不依赖于浸没液的温度。此外,与V(z)方法相反,V(x,t)方法的角分辨率在小入射角下更好。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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