Fabrication of acoustic microfluidic platforms for particle manipulation

Abstract

In this paper, a detailed fabrication process of an acoustic microfluidic platform is discussed. The platform consists of a piezoelectric wafer with interdigitated electrode transducers embedded in it. The fabrication process involves micro-patterning the interdigitated transducers using chromium to create surface acoustic waves. The fabrication steps include surface preparation, sputtering, spin coating, lithography, and chemical etching. The paper also includes an experiment in which the fabricated device is tested. Polystyrene particles are suspended in deionized water at a concentration of one million particles per milliliter. A droplet of the solution is placed on the wafer and the response of particles to the surface acoustic wave is investigated using an inverted microscope.