A control system for the ultrasonic 3-DOF micro/nano manipulator

Abstract

A 3D motion control system is designed and constructed to position the manipulating microprobe of an ultrasonic micro/nano manipulator. It is composed of a computer, controller, 3-DOF platform, jig, ultrasonic transducer and manipulating microprobe. The controller utilizes the STM32F103RBT6, which receives the instruction from a computer (via serial port communication), to drive the stepping motors. The interface software is constructed by LabView, for the human-computer interaction. Compared with the existing ultrasonic manipulation systems, the system has a higher positioning accuracy and solves the problem of the microprobe's jitter, which occurs in the beginning and end of the ultrasonic micro/nano manipulation.