A. Shcheglov, Yunfeng Nie, Hugo Thienpont, H. Ottevaere
{"title":"Miniaturized two-channel broadband spectrometer based on variable-spacing concave blazed gratings","authors":"A. Shcheglov, Yunfeng Nie, Hugo Thienpont, H. Ottevaere","doi":"10.1117/1.JOM.3.2.024501","DOIUrl":null,"url":null,"abstract":"Abstract. Recently, it becomes a tendency for cost-effective, portable spectrometers to have more applications from scientific research to daily life, e.g., in food safety and air pollution analysis. While most spectrometers utilize plane gratings, we demonstrate a more miniaturized, two-channel, broadband spectrometer based on variable-spacing concave gratings, combining the functionality of imaging optics and diffraction grating in one component. The added degree of design freedom in the micro-sized grating spacing further corrects most optical aberrations, thus the design achieves a tiny volume of <26 × 12 × 10 mm3 with a high spectral resolution. Simulation results show an optical resolution of <1.6 nm in the VIS-channel (400 to 790 nm) and <3.1 nm in the NIR-channel (760 to 1520 nm). The blazed structure of grating grooves provides a high overall diffraction efficiency in the whole spectral range, more than 50% on average. To further validate the feasibility for mass production, we successfully manufactured the variable-spacing concave gratings by using diamond tooling for fabricating the master mold and hot embossing for replication. Our fabricated variable-spacing grating replicas have a diffraction efficiency up to 70% in the VIS-channel and up to 60% in the NIR-channel. We built the prototype with fabricated concave gratings, and experimental results show a good match (error < 7 % ) in spectral resolution with the nominal design.","PeriodicalId":127363,"journal":{"name":"Journal of Optical Microsystems","volume":"139 3","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-03-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Optical Microsystems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/1.JOM.3.2.024501","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Abstract. Recently, it becomes a tendency for cost-effective, portable spectrometers to have more applications from scientific research to daily life, e.g., in food safety and air pollution analysis. While most spectrometers utilize plane gratings, we demonstrate a more miniaturized, two-channel, broadband spectrometer based on variable-spacing concave gratings, combining the functionality of imaging optics and diffraction grating in one component. The added degree of design freedom in the micro-sized grating spacing further corrects most optical aberrations, thus the design achieves a tiny volume of <26 × 12 × 10 mm3 with a high spectral resolution. Simulation results show an optical resolution of <1.6 nm in the VIS-channel (400 to 790 nm) and <3.1 nm in the NIR-channel (760 to 1520 nm). The blazed structure of grating grooves provides a high overall diffraction efficiency in the whole spectral range, more than 50% on average. To further validate the feasibility for mass production, we successfully manufactured the variable-spacing concave gratings by using diamond tooling for fabricating the master mold and hot embossing for replication. Our fabricated variable-spacing grating replicas have a diffraction efficiency up to 70% in the VIS-channel and up to 60% in the NIR-channel. We built the prototype with fabricated concave gratings, and experimental results show a good match (error < 7 % ) in spectral resolution with the nominal design.